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Multi Layer Processes Need Redundancy

The XL12 Multi Crystal Sensor Head has an exclusive patent pending design to meet industry standards. This unit can hold up to 12, 6 MHz crystals at one time allowing the user to take advantage of long term deposition runs while protecting their process from product loss due to crystal failures.


Multi Crystal Sensor Head
Defy Down-Time
Features:
  • Reliable
  • Small Footprint
  • Minimal Shadowing
  • Minimal Crystal Handling
  • Ease of Installation
  • Works w/ Present Thin Film Controllers
  • 1/3 the price of Leading Competitors Units

Specifications:
This revolutionary design is a small 1.5"W x 5.75"L x 1.4"H (see drawing) sensor head that uses slide technology to transfer the crystals. The Crystals are seated in Carriage Assemblies in order to provide guaranteed exchange during process. When the crystal in use expires, an operator can manually signal the next crystal to move into position or you can send a signal via your thin film monitor/controller. After a signal is given, the XL12 transfers the next crystal into position which moves the expired crystal into a holding compartment. To reload the XL12 you simply remove the self aligning Crystal Cartridge from the main body. You remove 2 screws and the top plate, you then re-load 12 new crystals, replace the top plate and reinstall the cartridge to the main body. This process takes less then 5 minutes.

XL12 Multi Crystal Sensor Head Package Includes:
  • Multi Crystal Sensor Head
  • Controller
  • 1" Bolt Feedthrough or 2-3/4 Conflat
  • 30" In-Vacuum cable
  • 12 Complementary Quartz Crystals
  • 15 Crystal Carriages
  • 2 Sensor Shields

Part #12-001



XL 12 Multi Crystal Single Head Package


XL12 Multi Crystal TriPlex Package

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